Feature
- SECS ∕ GEM
- Automated ultrasound cleansing
- Barcode reader
Advantages
- One-time 2 sets of Cassette
- Heating function
- 4 way flow and filtering function
Operation
- Tank 1 Chemical Ultrasonic
- Tank 2 Chemical Ultrasonic
- Tank 3 DIW Ultrasonic
- Tank 4 DIW Ultrasonic
- Tank 5 DIW Ultrasonic
- Tank 6 Vacuum Drying
Specifications
| Dimensions | 4330 mm × 2120 mm × 2980 mm ( Ｗ×Ｄ×Ｈ ) |
|---|---|
| Weight | 3500 kg |
| AC power | 415V (50/60 Hz) 3 phase 5 wire Volt.(V) 240V (50/60 Hz) (RSTNG) Volt.(V) |
| Air supply | Compressed Dry Air (CDA) 6~8 Kgf/cm2 |
| N2 | General Nitrogen 2 m³/min |
Object Wafer and Ring
| Wafer size | 6″ |
|---|---|
| Chip size | – |
| Laser cut depth | – |
| Frame size | – |
| Tape size | – |
Features
Automatic
Fully automatic rapid wash
Barcode reader
Loading station is equipped with quantity inspection and wafer cassette ID reading functions
Cassette
One-time 2 sets of Cassette
Ultrasound cleansing
Smart automatic frequency tracing machinery
Heating
Heating function, 80℃ heat limit
Sensor
Equipped with Level Sensor to detect liquid level for ultrasound and pump detection, and without leakage examination.
Up down flapping
Up down flapping function that allows rapid adjustment
Wafer slant
Wafer slant adjustment which allows angle adjustment
Flow and filtering
4 way flow and filtering function
Water resistance monitoring
Water resistance level monitoring
*The information provided here is for reference only. The actual specifications of equipment depend on the equipment requested and delivered.
