Feature
- The luminous exposure can automatically adjusted according to the light decay of a lamp, chambers filled with nitrogen, printed marks on curing workpieces
Advantages
- Illumination monitoring
- Nitrogen chamber setting
- Dual transport arm operation
- Loading and unloading in a AGV unmanned transport system
Operation
Fully Automatic
Specifications
| Dimensions | 2265 × 1435 × 2317 mm ( Ｗ×Ｄ×Ｈ ) |
|---|---|
| Weight | 1790 kg |
| AC power | single-phase 220V 60HZ |
| Air supply | 6kgf ∕ cm2 |
Object Wafer and Ring
| Wafer size | 8-inch、12-inch、square 212 × 216 mm |
|---|---|
| Ring size | outer diameter Ø296, inside diameter 250, width 276,ｔ＝1.2 mm
outer diameter Ø400, inside diameter 350, width 380,ｔ＝1.5 mm |
| Label size | – |
Features
Barcode reader
Cassette barcode reading, frame barcode reading.
Double Slot
The number of wafers in the cassette, position, stacked wafers, double-slot detection.
AGV
Loading and unloading in an unmanned transport system.
Temperature monitoring
Illuminance meter monitoring, temperature monitoring.
Signal Feedback
Digitization of each monitoring meter head and signal feedback.
Static Elimination
Static elimination device.
SEMI
SECS / GEM / E84
*The information provided here is for reference only. The actual specifications of equipment depend on the equipment requested and delivered.
